Preferential growth of thin rutile TiO 2 films upon thermal oxidation of sputtered Ti films

Author: Ting C.-C.   Chen S.-Y.   Liu D.-M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.402, Iss.1, 2002-01, pp. : 290-295

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Abstract