Synthesis of amorphous silicon carbonitride films by pulsed laser deposition

Author: Boughaba S.   Sproule G.I.   McCaffrey J.P.   Islam M.   Graham M.J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.402, Iss.1, 2002-01, pp. : 99-110

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Abstract