Multilayer diffusional growth in silicon-molybdenum interactions

Author: Yoon J.-K.   Byun J.-Y.   Kim G.-H.   Kim J.-S.   Choi C.-S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.405, Iss.1, 2002-02, pp. : 170-178

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Abstract