Characterization of carbon-boronnitride-coatings prepared with chemical vapor deposition by auger electron spectroscopy, electron probe microanalysis and secondary ion mass spectrometry

Author： Gammer K.   Kolber T.   Piplits K.   Nowikow K.   Tang X.   Haubner R.   Hutter H.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.406, Iss.1, 2002-03, pp. : 98-102

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