Formation of diamond and nanocrystalline diamond films by microwave plasma CVD

Author： Hiramatsu M.   Lau C.H.   Bennett A.   Foord J.S.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.407, Iss.1, 2002-03, pp. : 18-25

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