Effects of electron temperature on the quality of a-Si:H and c-Si film

Author： Kurimoto Y.   Shimizu T.   Iizuka S.   Suemitsu M.   Sato N.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.407, Iss.1, 2002-03, pp. : 7-11

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