Structural and mechanical properties of Ti-containing diamond-like carbon films deposited by filtered cathodic vacuum arc

Author: Ding X.-z.   Tay B.K.   Lau S.P.   Zhang P.   Zeng X.T.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.408, Iss.1, 2002-04, pp. : 183-187

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Abstract