Evaluation of elastic modulus and yield strength of Al film using an electrostatically actuated test device

Author: Lee S.-H.   Evans J.W.   Pak Y.E.   Jeon J.U.   Kwon D.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.408, Iss.1, 2002-04, pp. : 223-229

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Abstract