Ion irradiation effects on hardness and elastic modulus in AZ 1350J&unknown; photoresist film

Author： Foerster C.E.   Garcia I.T.S.   Zawislak F.C.   Serbena F.C.   Lepienski C.M.   Schreiner W.H.   Abbate M.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.411, Iss.2, 2002-05, pp. : 256-261

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