Real time monitoring of layer growth on planetary reactor ( R) by reflectance-anisotropy-spectroscopy

Author： Habets N.   Schmitt T.   Deufel M.   Lunenburger M.   Heuken M.   Juergensen H.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.409, Iss.1, 2002-04, pp. : 43-45

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