Preparation of highly conductive, deep ultraviolet transparent -Ga 2 O 3 thin film at low deposition temperatures

Author： Orita M.   Hiramatsu H.   Ohta H.   Hirano M.   Hosono H.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.411, Iss.1, 2002-05, pp. : 134-139

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