Modelling and experimental study of an O 2 /Ar/tetramethyltin discharge used for the deposition of transparent conductive thin tin oxide films

Author： Morscheidt W. Hassouni K. Arefi-Khonsari F. Amouroux J.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.427, Iss.1, 2003-03, pp. : 219-224

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