Rapid heat treatment for spin coated ITO films by electron plasma annealing method

Author： Wakagi M. Chahara K.-i. Onisawa K.-i. Kawakubo Y. Kichikawa T. Satoh T. Minemura T.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.411, Iss.1, 2002-05, pp. : 46-49

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