Evaluation of interfacial toughness and bond strength of sandwiched silicon structures

Author： Latella B.A.   Nicholls T.W.   Cassidy D.J.   Barbe C.J.   Triani G.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.411, Iss.2, 2002-05, pp. : 247-255

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