SIMS characterization of GaAs MIS devices at the interface

Author： Chakraborty B.R.   Dilawar N.   Pal S.   Bose D.N.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.411, Iss.2, 2002-05, pp. : 240-246

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