Preparation of Pb(Zr,Ti)O 3 thin films by RF-magnetron sputtering with single stoichiometric target: structural and electrical properties

Author： Thomas R. Mochizuki S. Mihara T. Ishida T.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.413, Iss.1, 2002-06, pp. : 65-75

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