The microstructure and X-ray reflectivity of Mo/Si multilayers

Author: Andreev S.S.   Gaponov S.V.   Gusev S.A.   Haidl M.N.   Kluenkov E.B.   Prokhorov K.A.   Polushkin N.I.   Sadova E.N.   Salashchenko N.N.   Suslov L.A.   Zuev S.Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.415, Iss.1, 2002-08, pp. : 123-132

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Abstract