A novel method of fabricating ZnO/diamond/Si multilayers for surface acoustic wave (SAW) device applications

Author： Seo S.-H.   Shin W.-C.   Park J.-S.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.416, Iss.1, 2002-09, pp. : 190-196

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