Preparation of SnO 2 films with high sensitivity and selectivity to C 2 H 5 OH by oxygen radical assisted electron beam evaporation for micro-machined gas sensors

Author： Mo Y.   Okawa Y.   Nakai T.   Tajima M.   Natukawa K.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.416, Iss.1, 2002-09, pp. : 248-253

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