Effects of surface roughness of substrates on the c-axis preferred orientation of ZnO films deposited by r.f. magnetron sputtering

Author: Lee J.B.   Kwak S.H.   Kim H.J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.423, Iss.2, 2003-01, pp. : 262-266

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Abstract