Effect of substrate temperature on the bonded states of indium tin oxide thin films deposited by plasma enhanced chemical vapor deposition

Author: Kim Y.-S.   Park Y.-C.   Ansari S.G.   Lee B.-S.   Shin H.-S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.426, Iss.1, 2003-02, pp. : 124-131

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