Influence of precursors gases on LPCVD TFT's characteristics

Author: Rogel R.   Gautier G.   Coulon N.   Sarret M.   Bonnaud O.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.427, Iss.1, 2003-03, pp. : 108-112

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Abstract