Deposition of transparent conductive tin oxide thin films doped with fluorine by PACVD

Author: Arefi-Khonsari F.   Bauduin N.   Donsanti F.   Amouroux J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.427, Iss.1, 2003-03, pp. : 208-214

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Abstract