From porous to compact films by changing the onset conditions of HW-CVD process

Author： Ferreira I.   Costa M.E.V.   Fortunato E.   Martins R.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.427, Iss.1, 2003-03, pp. : 225-230

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