Power density effects on the growth of microcrystalline silicon-carbon alloys by PECVD

Author： Coscia U.   Ambrosone G.   Lettieri S.   Maddalena P.   Rava P.   Minarini C.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.427, Iss.1, 2003-03, pp. : 284-288

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