Properties of a-SiC:H films deposited in high power regime

Author： Ambrosone G. Ballarini V. Coscia U. Ferrero S. Giorgis F. Maddalena P. Patelli A. Rava P. Rigato V.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.427, Iss.1, 2003-03, pp. : 279-283

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