Influence of the deposition pressure on the properties of transparent and conductive ZnO:Ga thin-film produced by r.f. sputtering at room temperature

Author： Assuncao V. Fortunato E. Marques A. Aguas H. Ferreira I. Costa M.E.V. Martins R.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.427, Iss.1, 2003-03, pp. : 401-405

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