Advanced excimer-laser crystallization process for single-crystalline thin film transistors

Author： Ishihara R.   van der Wilt P.C.   van Dijk B.D.   Burtsev A.   Metselaar J.W.   Beenakker C.I.M.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.427, Iss.1, 2003-03, pp. : 77-85

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