Advanced excimer-laser crystallization process for single-crystalline thin film transistors

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Single shot excimer laser crystallization and LPCVD silicon TFTs

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Temperature analysis of polysilicon thin-film transistors made by excimer laser crystallization

By Foglietti V.   Mariucci L.   Fortunato G.  

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Excimer laser crystallization of amorphous silicon on metal coated glass substrates

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Single shot excimer laser crystallization of silicon films deposited by LPCVD

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