Dielectric properties of anodic films formed on sputtering-deposited tantalum in phosphoric acid solution

Author: Lu Q.   Mato S.   Skeldon P.   Thompson G.E.   Masheder D.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.429, Iss.1, 2003-04, pp. : 238-242

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Abstract