Author: Patil S.B. Kumbhar A.A. Saraswat S. Dusane R.O.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.430, Iss.1, 2003-04, pp. : 257-260
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Room-temperature deposition of a-SiC:H thin films by ion-assisted plasma-enhanced CVD
Thin Solid Films, Vol. 283, Iss. 1, 1996-09 ,pp. :
Homogeneous CVD -Si:H thin film based position sensitive photodetector
By Toneva A. Mihailova T. Sueva D. Georgiev S.
Vacuum, Vol. 47, Iss. 10, 1996-10 ,pp. :
Combinatorial hot-wire CVD approach to exploring thin-film Si materials and devices
By Wang Q.
Thin Solid Films, Vol. 430, Iss. 1, 2003-04 ,pp. :