Study of cobalt silicides formation in Co/Ta-W/Si(100) multilayer systems

Author: Moshfegh A.Z.   Hashemifar S.J.   Akhavan O.   Azimirad R.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.433, Iss.1, 2003-06, pp. : 298-304

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Abstract