Damage after annealing and aging at room temperature of platinized silicon substrates

Author: Moret M.P.   Devillers M.A.C.   Tichelaar F.D.   Aret E.   Hageman P.R.   Larsen P.K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.434, Iss.1, 2003-06, pp. : 283-295

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Abstract