Effect of substrate bias voltage on the purity of Cu films deposited by non-mass separated ion beam deposition

Author: Lim J.-W.   Mimura K.   Miyake K.   Yamashita M.   Isshiki M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.434, Iss.1, 2003-06, pp. : 30-33

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Abstract