The distribution of Cu and resultant resistivity change in sputter deposited Al-Cu film as a conductive layer

Author: Lee D.H.   Jeon D.M.   Yoon S.Y.   Lee J.P.   Kim B.G.   Suh S.J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.435, Iss.1, 2003-07, pp. : 170-173

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Abstract