Development of a large-area, multi-helicon rectangular plasma source for TFT-LCD processing

Author: Kim Y.J.   Han S.H.   Hwang W.   Hwang Y.S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.435, Iss.1, 2003-07, pp. : 270-274

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Abstract