Linear internal inductively coupled plasma (ICP) source with magnetic fields for large area processing

Author: Lee Y.J.   Kim K.N.   Song B.K.   Yeom G.Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.435, Iss.1, 2003-07, pp. : 275-279

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Abstract