Growth characteristics of carbon nanotubes via aluminum nanopore template on Si substrate using PECVD

Author: Kim M.J.   Choi J.H.   Park J.B.   Kim S.K.   Yoo J.-B.   Park C.-Y.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.435, Iss.1, 2003-07, pp. : 312-317

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