A MEMS toolkit for metal-oxide-based gas sensing systems

Author： Muller G.   Friedberger A.   Kreisl P.   Ahlers S.   Schulz O.   Becker T.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.436, Iss.1, 2003-07, pp. : 34-45

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