Reactively sputtered MoO 3 films for ammonia sensing

Author: Prasad A.K.   Gouma P.I.   Kubinski D.J.   Visser J.H.   Soltis R.E.   Schmitz P.J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.436, Iss.1, 2003-07, pp. : 46-51

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Abstract