Effect of metal vapor vacuum arc Cr-implanted interlayers on the microstructure of CrN film on silicon

Author: Han S.   Chen H.-Y.   Chang Z.-C.   Lin J.-H.   Yang C.-J.   Lu F.-H.   Shieu F.-S.   Shih H.C.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.436, Iss.2, 2003-07, pp. : 238-243

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Abstract