Formation of tantalum nitride films by rapid thermal processing

Author： Angelkort C.   Berendes A.   Lewalter H.   Bock W.   Kolbesen B.O.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.437, Iss.1, 2003-08, pp. : 108-115

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