Microstructural characterization and mechanical reliability of interfaces in piezoelectric based microelectromechanical systems

Author： Eakins L.M.R.   Olson B.W.   Richards C.D.   Richards R.F.   Bahr D.F.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.441, Iss.1, 2003-09, pp. : 180-186

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