Sn- or Hf-doped InSbO 4 films deposited by RF magnetron sputtering

Author: Song P.K.   Shimada Y.   Shigeasto Y.   Hattori T.   Ishida M.   Saegusa K.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.442, Iss.1, 2003-10, pp. : 184-188

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