Physical and mechanical properties of reactively sputtered chromium boron nitride thin films

Author: Gorishnyy T.Z.   Mihut D.   Rohde S.L.   Aouadi S.M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.445, Iss.1, 2003-11, pp. : 96-104

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Abstract