High rate deposition of insulating TiO 2 and conducting ITO films for optical and display applications

Author： Frach P.   Glosz D.   Goedicke K.   Fahland M.   Gnehr W.-M.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.445, Iss.2, 2003-12, pp. : 251-258

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