Investigation of multilayered Ge/Si structures with varying thicknesses

Author： Kiselev N.A.   Lebedev O.I.   Vasiliev A.L.   Antipov M.V.   Orlikovsky A.A.   Valiev K.A.   Vasiliev A.G.  

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.46, Iss.3, 1995-03, pp. : 269-276

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