The effect of self-ions bombardment on the structure and properties of thin metal films

Author: Kononenko O.V.   Matveev V.N.   Kislov N.A.   Khodos I.I.   Kasumov A.Y.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.46, Iss.7, 1995-07, pp. : 685-690

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Abstract