Author： Hisamatsu H. Ishimaru H. Kanazawa K. Kato S. Nakagawa M. Terunuma N. Suetsugu Y. Shimamoto M. Sato M.
Publisher： Elsevier
ISSN： 0042-207X
Source： Vacuum, Vol.47, Iss.6, 1996-06, pp. : 601-603
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