Author: Kobari T. Satoh O. Hirano N. Matsumoto M. Katane M. Matsuzaki M. Sakurabata H. Suetsugu Y. Kanazawa K.
Publisher: Elsevier
ISSN: 0042-207X
Source: Vacuum, Vol.47, Iss.6, 1996-06, pp. : 605-608
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Abstract
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